- etch-stop technique
- метод зупинки травлення.
English-Ukrainian dictionary of microelectronics. 2013.
etch-stop technique
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Microelectromechanical systems — (MEMS) (also written as micro electro mechanical, MicroElectroMechanical or microelectronic and microelectromechanical systems) is the technology of very small mechanical devices driven by electricity; it merges at the nano scale into… … Wikipedia
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